Journal Report

JOURNAL OF MICRO- NANOPATTERNING MATERIALS AND METROLOGY-JM3

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Journal Information
Journal Title
JOURNAL OF MICRO- NANOPATTERNING MATERIALS AND METROLOGY-JM3
Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
ISSN
1932-5150
E-ISSN
2708-8340
Database
Clarivate
Domain
Physical Sciences
Classification History
Year A+ A B C
2026 ✓
2025 ✓
2024 ✓ ✓
2023 ✓ ✓
2021/2022 ✓ ✓
2020 ✓ ✓
2019 ✓ ✓
2018 ✓
A journal may have more than one classification in the same year. All recorded classifications are displayed.
Recent Articles
High aspect ratio patterning of photosensitive polyimide with low thermal expansion coefficient and low dielectric constant
Andrew R. Dick, William K. Bell, Brendan Luke et al.
2016-7-26 Vol. 15 Issue 3 Pages 033503
DOI: 10.1117/1.jmm.15.3.033503
Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements
Quang Duc Pham, Yoshio Hayasaki
2015-8-7 Vol. 14 Issue 3 Pages 031301
DOI: 10.1117/1.jmm.14.3.031301
Layout optimization method to equalize the best-focus position of different patterns
Jaione Tirapu-Azpiroz, Alan E. Rosenbluth, Timothy Brunner
2014-6-27 Vol. 13 Issue 2 Pages 020502
DOI: 10.1117/1.jmm.13.2.020502
Articles retrieved from Crossref.
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Printed: November 13, 2026 08:26